Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840061 | Substrate processing chamber including conical surface for reducing recirculation | Richard Phillips, Shankar Swaminathan | 2020-11-17 |
| 10648079 | Reducing backside deposition at wafer edge | Chloe Baldasseroni, Andrew Duvall, Shankar Swaminathan | 2020-05-12 |