Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804094 | Methods of depositing SiCON with C, O and N compositional control | Mark Saly, David Thompson, Thomas Knisley | 2020-10-13 |
| 10699897 | Acetylide-based silicon precursors and their use as ALD/CVD precursors | Mark Saly, Jeffrey W. Anthis, Feng Q. Liu, David Thompson | 2020-06-30 |