Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879081 | Methods of reducing or eliminating defects in tungsten film | Guoqiang Jian, Wei V. Tang, Chi-Chou Lin, Paul F. Ma, Vikash Banthia +4 more | 2020-12-29 |
| 10727119 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Yu Lei, Mehul Naik, Zhiyuan Wu +2 more | 2020-07-28 |