Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10753900 | Real-time in situ sensing of water-related parameters using micro-electrode array | Baikun Li, Zhiheng Xu | 2020-08-25 |
| 10727119 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Kai Wu, Mehul Naik, Zhiyuan Wu +2 more | 2020-07-28 |
| 10699946 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Xinyu Fu, Srinivas Gandikota +2 more | 2020-06-30 |
| 10665450 | Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films | Yixiong Yang, Paul F. Ma, Wei V. Tang, Wenyu Zhang, Shih Chung Chen +6 more | 2020-05-26 |