Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770300 | Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity | Takashi Kuratomi, I-Cheng Chen, Faruk Gungor | 2020-09-08 |
| 10699946 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2020-06-30 |
| 10615034 | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel | Bo Zheng, Anshul Ashok Vyas, Raymond Hung | 2020-04-07 |
| 10535527 | Methods for depositing semiconductor films | Yi Xu, Takashi Kuratomi, Vikash Banthia, Mei Chang, Kazuya Daito | 2020-01-14 |