Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793951 | Apparatus to improve substrate temperature uniformity | Gwo-Chuan Tzu, Sang-Hyeob Lee | 2020-10-06 |
| 10620031 | System for measuring level of a precursor in a container | Vijay Venugopal | 2020-04-14 |
| 10535527 | Methods for depositing semiconductor films | Yi Xu, Takashi Kuratomi, Avgerinos V. Gelatos, Vikash Banthia, Mei Chang | 2020-01-14 |