Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10857655 | Substrate support plate with improved lift pin sealing | Olkan Cuvalci, Xiaoxiong Yuan | 2020-12-08 |
| 10793951 | Apparatus to improve substrate temperature uniformity | Kazuya Daito, Sang-Hyeob Lee | 2020-10-06 |