Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793951 | Apparatus to improve substrate temperature uniformity | Gwo-Chuan Tzu, Kazuya Daito | 2020-10-06 |
| 10714388 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Thomas Jongwan Kwon, Jaesoo Ahn, Xianmin Tang +2 more | 2020-07-14 |