Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879177 | PVD deposition and anneal of multi-layer metal-dielectric film | Minrui Yu, Kai Ma, Kaushal K. Singh, Er-Xuan Ping | 2020-12-29 |
| 10825681 | 3D CTF integration using hybrid charge trap layer of sin and self aligned SiGe nanodot | Sungwon Jun | 2020-11-03 |
| 10714388 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Sang-Hyeob Lee, Jaesoo Ahn, Xianmin Tang +2 more | 2020-07-14 |
| 10622214 | Tungsten defluorination by high pressure treatment | Keith Tatseun Wong, Sean S. Kang, Ellie Yieh | 2020-04-14 |