Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847360 | High pressure treatment of silicon nitride film | Sean S. Kang, Srinivas D. Nemani, Ellie Yieh | 2020-11-24 |
| 10818510 | Self-assembled monolayer blocking with intermittent air-water exposure | Tobin Kaufman-Osborn | 2020-10-27 |
| 10790183 | Selective oxidation for 3D device isolation | Shiyu Sun, Kurtis Leschkies, Namsung Kim, Srinivas D. Nemani | 2020-09-29 |
| 10636704 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Bencherki Mebarki, Sean S. Kang, He Ren, Mehul Naik, Ellie Yieh +1 more | 2020-04-28 |
| 10622214 | Tungsten defluorination by high pressure treatment | Thomas Jongwan Kwon, Sean S. Kang, Ellie Yieh | 2020-04-14 |
| 10529603 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sultan Malik +1 more | 2020-01-07 |