Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10857655 | Substrate support plate with improved lift pin sealing | Olkan Cuvalci, Gwo-Chuan Tzu | 2020-12-08 |
| 10752990 | Apparatus and methods to remove residual precursor inside gas lines post-deposition | Daping Yao, Kenric Choi, Jiang Lu, Can Xu, Paul F. Ma +1 more | 2020-08-25 |
| 10593539 | Support assembly | Chien-Teh Kao, Joel M. Huston, Mei Chang | 2020-03-17 |