Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10752990 | Apparatus and methods to remove residual precursor inside gas lines post-deposition | Daping Yao, Xiaoxiong Yuan, Jiang Lu, Can Xu, Paul F. Ma +1 more | 2020-08-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10752990 | Apparatus and methods to remove residual precursor inside gas lines post-deposition | Daping Yao, Xiaoxiong Yuan, Jiang Lu, Can Xu, Paul F. Ma +1 more | 2020-08-25 |