Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879090 | High temperature process chamber lid | Ilker Durukan, Dien-Yeh Wu, Chien-Teh Kao, Mei Chang | 2020-12-29 |
| 10593539 | Support assembly | Chien-Teh Kao, Mei Chang, Xiaoxiong Yuan | 2020-03-17 |