Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879090 | High temperature process chamber lid | Ilker Durukan, Joel M. Huston, Dien-Yeh Wu, Mei Chang | 2020-12-29 |
| 10751765 | Remote plasma source cleaning nozzle for cleaning a gas distribution plate | Tae Kyung Won, Young Dong LEE, Soo Young Choi, Sanjay Yadav | 2020-08-25 |
| 10697062 | Gas flow guide design for uniform flow distribution and efficient purge | Jeffrey A. Kho, Xiangxin Rui, Jianhua Zhou, Shinichi Kurita, ShouQian Shao +1 more | 2020-06-30 |
| 10593539 | Support assembly | Joel M. Huston, Mei Chang, Xiaoxiong Yuan | 2020-03-17 |