Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879090 | High temperature process chamber lid | Ilker Durukan, Joel M. Huston, Chien-Teh Kao, Mei Chang | 2020-12-29 |
| 10640870 | Gas feedthrough assembly | Daping Yao, Hyman Lam, Jiang Lu, Can Xu, Paul F. Ma +1 more | 2020-05-05 |