Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10697062 | Gas flow guide design for uniform flow distribution and efficient purge | Chien-Teh Kao, Jeffrey A. Kho, Xiangxin Rui, Jianhua Zhou, ShouQian Shao +1 more | 2020-06-30 |
| 10655222 | Thin film encapsulation processing system and process kit | Srikanth V. RACHERLA, Suhas Bhoski, Xiangxin Rui | 2020-05-19 |
| 10604846 | Thin film encapsulation mask preheat and substrate buffer chamber | Makoto Inagawa, Suhas Bhoski | 2020-03-31 |