Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655222 | Thin film encapsulation processing system and process kit | Shinichi Kurita, Srikanth V. RACHERLA, Xiangxin Rui | 2020-05-19 |
| 10604846 | Thin film encapsulation mask preheat and substrate buffer chamber | Shinichi Kurita, Makoto Inagawa | 2020-03-31 |