Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10751765 | Remote plasma source cleaning nozzle for cleaning a gas distribution plate | Tae Kyung Won, Young Dong LEE, Chien-Teh Kao, Soo Young Choi | 2020-08-25 |
| 10697063 | Corner spoiler for improving profile uniformity | Lai ZHAO, Gaku Furuta, Qunhua Wang, Robin L. Tiner, Beom Soo Park +1 more | 2020-06-30 |