Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665450 | Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films | Yixiong Yang, Paul F. Ma, Wei V. Tang, Wenyu Zhang, Shih Chung Chen +6 more | 2020-05-26 |
| 10535527 | Methods for depositing semiconductor films | Takashi Kuratomi, Avgerinos V. Gelatos, Vikash Banthia, Mei Chang, Kazuya Daito | 2020-01-14 |