Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770300 | Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity | Avgerinos V. Gelatos, I-Cheng Chen, Faruk Gungor | 2020-09-08 |
| 10535527 | Methods for depositing semiconductor films | Yi Xu, Avgerinos V. Gelatos, Vikash Banthia, Mei Chang, Kazuya Daito | 2020-01-14 |