Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879081 | Methods of reducing or eliminating defects in tungsten film | Guoqiang Jian, Wei V. Tang, Chi-Chou Lin, Paul F. Ma, Kai Wu +4 more | 2020-12-29 |
| 10727119 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Yu Lei, Kai Wu, Mehul Naik +2 more | 2020-07-28 |
| 10704147 | Process kit design for in-chamber heater and wafer rotating mechanism | Muhammad M. Rasheed, Muhannad Mustafa, Hamid Tavassoli, Steven V. Sansoni, Cheng-Hsiung Tsai | 2020-07-07 |
| 10535527 | Methods for depositing semiconductor films | Yi Xu, Takashi Kuratomi, Avgerinos V. Gelatos, Mei Chang, Kazuya Daito | 2020-01-14 |