Issued Patents 2020
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854511 | Methods of lowering wordline resistance | Yihong Chen, Yong Wu, Chia Cheng Chin, Xinliang Lu, Ziqing Duan +1 more | 2020-12-01 |
| 10854461 | Tungsten deposition without barrier layer | Yihong Chen, Yong Wu, Chia Cheng Chin, Kelvin Chan | 2020-12-01 |
| 10851454 | Metal deposition methods | Yong Wu, Abhijit Basu Mallick | 2020-12-01 |
| 10811303 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan +1 more | 2020-10-20 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| 10741435 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Pramit Manna | 2020-08-11 |
| 10699952 | Deposition and treatment of films for patterning | Atashi Basu, Abhijit Basu Mallick, Ziqing Duan | 2020-06-30 |
| 10699946 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2020-06-30 |
| 10636669 | Seam healing using high pressure anneal | Yihong Chen, Rui Cheng, Pramit Manna, Abhijit Basu Mallick, Shishi Jiang +2 more | 2020-04-28 |
| 10636659 | Selective deposition for simplified process flow of pillar formation | Yihong Chen, Ziqing Duan, Yong Wu, Abhijit Basu Mallick | 2020-04-28 |
| 10622221 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Susmit Singha Roy, Yingli Rao, Regina Freed +1 more | 2020-04-14 |
| 10600684 | Ultra-thin diffusion barriers | Susmit Singha Roy, Yihong Chen, Abhijit Basu Mallick | 2020-03-24 |
| 10559497 | Seamless tungsten fill by tungsten oxidation-reduction | Yong Wu, Yihong Chen, Shishi Jiang, Ziqing Duan, Abhijit Basu Mallick | 2020-02-11 |
| 10529602 | Method and apparatus for substrate fabrication | Priyadarshi Panda, Gill Yong Lee, Sung-Kwan Kang, Sanjay Natarajan | 2020-01-07 |