Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818490 | Controlled growth of thin silicon oxide film at low temperature | Kurtis Leschkies, Pramit Manna, Abhijit Basu Mallick, Steven Verhaverbeke | 2020-10-27 |
| 10784107 | Methods of forming tungsten pillars | Abhijit Basu Mallick, Pramit Manna, Yihong Chen, Ziqing Duan, Rui Cheng | 2020-09-22 |
| 10714339 | Selectively deposited parylene masks and methods related thereto | Fei Wang, Miaojun Wang, Pramit Manna, Abhijit Basu Mallick, Robert Jan Visser | 2020-07-14 |
| 10699903 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Pramit Manna, Rui Cheng, Abhijit Basu Mallick | 2020-06-30 |
| 10643841 | Surface modification to improve amorphous silicon gapfill | Pramit Manna, Abhijit Basu Mallick | 2020-05-05 |
| 10636669 | Seam healing using high pressure anneal | Yihong Chen, Rui Cheng, Pramit Manna, Abhijit Basu Mallick, Yong Wu +2 more | 2020-04-28 |
| 10580642 | Two-step process for silicon gapfill | Abhijit Basu Mallick, Pramit Manna | 2020-03-03 |
| 10559497 | Seamless tungsten fill by tungsten oxidation-reduction | Yong Wu, Yihong Chen, Ziqing Duan, Abhijit Basu Mallick, Srinivas Gandikota | 2020-02-11 |
| 10529585 | Dry stripping of boron carbide hardmask | Pramit Manna, Abhijit Basu Mallick, Kurtis Leschkies | 2020-01-07 |