| 10840088 |
Low temperature high-quality dielectric films |
Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick |
2020-11-17 |
| 10818490 |
Controlled growth of thin silicon oxide film at low temperature |
Shishi Jiang, Kurtis Leschkies, Abhijit Basu Mallick, Steven Verhaverbeke |
2020-10-27 |
| 10811303 |
Methods for gapfill in high aspect ratio structures |
Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more |
2020-10-20 |
| 10784107 |
Methods of forming tungsten pillars |
Abhijit Basu Mallick, Yihong Chen, Ziqing Duan, Rui Cheng, Shishi Jiang |
2020-09-22 |
| 10745282 |
Diamond-like carbon film |
Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick |
2020-08-18 |
| 10741435 |
Oxidative volumetric expansion of metals and metal containing compounds |
Susmit Singha Roy, Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota |
2020-08-11 |
| 10714339 |
Selectively deposited parylene masks and methods related thereto |
Fei Wang, Miaojun Wang, Shishi Jiang, Abhijit Basu Mallick, Robert Jan Visser |
2020-07-14 |
| 10699903 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film |
Shishi Jiang, Rui Cheng, Abhijit Basu Mallick |
2020-06-30 |
| 10643841 |
Surface modification to improve amorphous silicon gapfill |
Shishi Jiang, Abhijit Basu Mallick |
2020-05-05 |
| 10636669 |
Seam healing using high pressure anneal |
Yihong Chen, Rui Cheng, Abhijit Basu Mallick, Shishi Jiang, Yong Wu +2 more |
2020-04-28 |
| 10626495 |
Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing |
Rui Cheng, Abhijit Basu Mallick |
2020-04-21 |
| 10615050 |
Methods for gapfill in high aspect ratio structures |
Rui Cheng, Abhijit Basu Mallick, Yihong Chen |
2020-04-07 |
| 10580642 |
Two-step process for silicon gapfill |
Abhijit Basu Mallick, Shishi Jiang |
2020-03-03 |
| 10529568 |
PECVD tungsten containing hardmask films and methods of making |
Susmit Singha Roy, Rui Cheng, Abhijit Basu Mallick |
2020-01-07 |
| 10529585 |
Dry stripping of boron carbide hardmask |
Shishi Jiang, Abhijit Basu Mallick, Kurtis Leschkies |
2020-01-07 |
