Issued Patents 2020
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840088 | Low temperature high-quality dielectric films | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2020-11-17 |
| 10818490 | Controlled growth of thin silicon oxide film at low temperature | Shishi Jiang, Kurtis Leschkies, Abhijit Basu Mallick, Steven Verhaverbeke | 2020-10-27 |
| 10811303 | Methods for gapfill in high aspect ratio structures | Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2020-10-20 |
| 10784107 | Methods of forming tungsten pillars | Abhijit Basu Mallick, Yihong Chen, Ziqing Duan, Rui Cheng, Shishi Jiang | 2020-09-22 |
| 10745282 | Diamond-like carbon film | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2020-08-18 |
| 10741435 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota | 2020-08-11 |
| 10714339 | Selectively deposited parylene masks and methods related thereto | Fei Wang, Miaojun Wang, Shishi Jiang, Abhijit Basu Mallick, Robert Jan Visser | 2020-07-14 |
| 10699903 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Shishi Jiang, Rui Cheng, Abhijit Basu Mallick | 2020-06-30 |
| 10643841 | Surface modification to improve amorphous silicon gapfill | Shishi Jiang, Abhijit Basu Mallick | 2020-05-05 |
| 10636669 | Seam healing using high pressure anneal | Yihong Chen, Rui Cheng, Abhijit Basu Mallick, Shishi Jiang, Yong Wu +2 more | 2020-04-28 |
| 10626495 | Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing | Rui Cheng, Abhijit Basu Mallick | 2020-04-21 |
| 10615050 | Methods for gapfill in high aspect ratio structures | Rui Cheng, Abhijit Basu Mallick, Yihong Chen | 2020-04-07 |
| 10580642 | Two-step process for silicon gapfill | Abhijit Basu Mallick, Shishi Jiang | 2020-03-03 |
| 10529568 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Rui Cheng, Abhijit Basu Mallick | 2020-01-07 |
| 10529585 | Dry stripping of boron carbide hardmask | Shishi Jiang, Abhijit Basu Mallick, Kurtis Leschkies | 2020-01-07 |