Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790191 | Selective removal process to create high aspect ratio fully self-aligned via | Madhur Sachan, He Ren, Swaminathan Srinivasan, Regina Freed, Uday Mitra | 2020-09-29 |
| 10699953 | Method for creating a fully self-aligned via | Nitin K. Ingle, Xikun Wang, Regina Freed, Uday Mitra, Ho-yung David Hwang | 2020-06-30 |
| 10622221 | Methods of etching metal oxides with less etch residue | Abhijit Basu Mallick, Srinivas Gandikota, Susmit Singha Roy, Yingli Rao, Regina Freed +1 more | 2020-04-14 |