Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790191 | Selective removal process to create high aspect ratio fully self-aligned via | Amrita B. Mullick, Madhur Sachan, He Ren, Swaminathan Srinivasan, Regina Freed | 2020-09-29 |
| 10699953 | Method for creating a fully self-aligned via | Amrita B. Mullick, Nitin K. Ingle, Xikun Wang, Regina Freed, Ho-yung David Hwang | 2020-06-30 |
| 10622221 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Srinivas Gandikota, Susmit Singha Roy, Yingli Rao +1 more | 2020-04-14 |
| 10600688 | Methods of producing self-aligned vias | Ying Zhang, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang | 2020-03-24 |
| 10593594 | Selectively etched self-aligned via processes | Yung-Chen Lin, Qingjun Zhou, Ying Zhang, Ho-yung David Hwang, Regina Freed | 2020-03-17 |
| 10573555 | Methods of producing self-aligned grown via | Ying Zhang, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Abhijit Basu Mallick | 2020-02-25 |
| 10553485 | Methods of producing fully self-aligned vias and contacts | Ying Zhang, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Abhijit Basu Mallick +1 more | 2020-02-04 |