Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840138 | Selectively etched self-aligned via processes | Yung-Chen Lin, Qingjun Zhou, Ho-yung David Hwang | 2020-11-17 |
| 10796888 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2020-10-06 |
| 10770568 | Method to remove III-V materials in high aspect ratio structures | Xinyu BAO, Qingjun Zhou, YungChen Lin | 2020-09-08 |
| 10741393 | Methods for bottom up fin structure formation | Yung-Chen Lin, Qingjun Zhou, Xinyu BAO | 2020-08-11 |
| 10692728 | Use of selective aluminum oxide etch | Qingjun Zhou, Yung-Chen Lin | 2020-06-23 |
| 10600688 | Methods of producing self-aligned vias | Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Uday Mitra | 2020-03-24 |
| 10593594 | Selectively etched self-aligned via processes | Yung-Chen Lin, Qingjun Zhou, Ho-yung David Hwang, Uday Mitra, Regina Freed | 2020-03-17 |
| 10573555 | Methods of producing self-aligned grown via | Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Uday Mitra, Abhijit Basu Mallick | 2020-02-25 |
| 10553485 | Methods of producing fully self-aligned vias and contacts | Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Uday Mitra, Abhijit Basu Mallick +1 more | 2020-02-04 |