Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818481 | Smart device fabrication via precision patterning | Jennifer Y. Sun, Yikai Chen, Vahid Firouzdor | 2020-10-27 |
| 10815562 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2020-10-27 |
| 10796888 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2020-10-06 |
| 10730798 | Slurry plasma spray of plasma resistant ceramic coating | Jennifer Y. Sun, Yikai Chen, Vahid Firouzdor | 2020-08-04 |
| 10734202 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Jennifer Y. Sun, Tom K. Cho | 2020-08-04 |
| 10604831 | Plasma spray coating design using phase and stress control | Jennifer Y. Sun, Yikai Chen | 2020-03-31 |
| 10584068 | Rare-earth oxide based chamber material | Jennifer Y. Sun | 2020-03-10 |
| 10577286 | Rare-earth oxide based chamber material | Jennifer Y. Sun | 2020-03-03 |
| 10563297 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Vahid Firouzdor | 2020-02-18 |
| 10544500 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Vahid Firouzdor | 2020-01-28 |