Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734202 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Jennifer Y. Sun, Biraja P. Kanungo | 2020-08-04 |
| 10727096 | Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance | Andrew Nguyen, Yogananda Sarode Vishwanath | 2020-07-28 |
| 10685819 | Measuring concentrations of radicals in semiconductor processing | Ramesh Gopalan, George Alajajian, Michael J. Mark | 2020-06-16 |
| 10672591 | Apparatus for removing particles from a twin chamber processing system | Andrew Nguyen, Kartik Ramaswamy, Yogananda Sarode Vishwanath | 2020-06-02 |