Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847351 | Plasma chamber with tandem processing regions | Andrew Nguyen, Xue Yang Chang | 2020-11-24 |
| 10790123 | Process kit with adjustable tuning ring for edge uniformity control | — | 2020-09-29 |
| 10770269 | Apparatus and methods for reducing particles in semiconductor process chambers | Andrew Nguyen, Bradley J. Howard, Shahid Rauf, Ajit Balakrishna, Tom Choi +3 more | 2020-09-08 |
| 10727096 | Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance | Andrew Nguyen, Tom K. Cho | 2020-07-28 |
| 10600623 | Process kit with adjustable tuning ring for edge uniformity control | — | 2020-03-24 |