Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847351 | Plasma chamber with tandem processing regions | Andrew Nguyen, Yogananda Sarode Vishwanath | 2020-11-24 |
| 10811233 | Process chamber having tunable showerhead and tunable liner | Andrew Nguyen, Haitao Wang, Kei-Yu Ko, Reza Sadjadi | 2020-10-20 |