Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770269 | Apparatus and methods for reducing particles in semiconductor process chambers | Andrew Nguyen, Shahid Rauf, Ajit Balakrishna, Tom Choi, Kenneth S. Collins +3 more | 2020-09-08 |