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Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide |
Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu |
2020-11-24 |
| 10840113 |
Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide |
Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu |
2020-11-17 |
| 10840112 |
Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide |
Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu |
2020-11-17 |
| 10811226 |
Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates |
James D. Carducci, Richard Fovell, Jason A. Kenney, Kartik Ramaswamy, Shahid Rauf |
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| 10790153 |
Methods and apparatus for electron beam etching process |
Yue Guo, Yang Yang, Kartik Ramaswamy, Steven Lane, Gonzalo Monroy +1 more |
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| 10784085 |
Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber |
Kartik Ramaswamy, Steven Lane, Yang Yang, Lawrence Wong |
2020-09-22 |
| 10770269 |
Apparatus and methods for reducing particles in semiconductor process chambers |
Andrew Nguyen, Bradley J. Howard, Shahid Rauf, Ajit Balakrishna, Tom Choi +3 more |
2020-09-08 |
| 10707086 |
Etching methods |
Yang Yang, Kartik Ramaswamy, Steven Lane, Gonzalo Monroy, Lucy Chen +1 more |
2020-07-07 |
| 10622194 |
Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance |
Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu |
2020-04-14 |
| 10615006 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more |
2020-04-07 |
| 10615004 |
Distributed electrode array for plasma processing |
Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman |
2020-04-07 |
| 10580620 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more |
2020-03-03 |
| 10546728 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more |
2020-01-28 |
| 10544505 |
Deposition or treatment of diamond-like carbon in a plasma reactor |
Yang Yang, Kartik Ramaswamy, Steven Lane, Gonzalo Monroy, Lucy Chen +1 more |
2020-01-28 |
| 10535502 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more |
2020-01-14 |
