Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790153 | Methods and apparatus for electron beam etching process | Yue Guo, Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Gonzalo Monroy +1 more | 2020-09-29 |
| 10784085 | Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber | Kartik Ramaswamy, Kenneth S. Collins, Yang Yang, Lawrence Wong | 2020-09-22 |
| 10707086 | Etching methods | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Gonzalo Monroy, Lucy Chen +1 more | 2020-07-07 |
| 10544505 | Deposition or treatment of diamond-like carbon in a plasma reactor | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Gonzalo Monroy, Lucy Chen +1 more | 2020-01-28 |