Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784085 | Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber | Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Yang Yang | 2020-09-22 |
| 10656194 | Real-time measurement of a surface charge profile of an electrostatic chuck | Haitao Wang, Kartik Ramaswamy, Chunlei Zhang | 2020-05-19 |