Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2020-12-01 |
| 10781446 | RNA nanoparticle for treatment of gastric cancer | Peixuan Guo, Daxiang Cui, Dan Shu, Yi Shu | 2020-09-22 |
| 10784132 | Method and apparatus for de-chucking a workpiece using a swing voltage sequence | Haitao Wang, Wonseok Lee, Sergio Fukuda Shoji, Kartik Ramaswamy | 2020-09-22 |
| 10770270 | High power electrostatic chuck with aperture-reducing plug in a gas hole | Jaeyong Cho, Haitao Wang, Vijay D. Parkhe, Kartik Ramaswamy | 2020-09-08 |
| 10745807 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Sergio Fukuda Shoji, Kartik Ramaswamy, Roland Smith +1 more | 2020-08-18 |
| 10679783 | Network transformer apparatus and methods of making and using the same | Sheshe Zhao, Yonggang Wang | 2020-06-09 |
| 10656194 | Real-time measurement of a surface charge profile of an electrostatic chuck | Haitao Wang, Lawrence Wong, Kartik Ramaswamy | 2020-05-19 |
| 10593518 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Katsumasa Kawasaki | 2020-03-17 |