Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593518 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2020-03-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593518 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2020-03-17 |