Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854427 | Radio frequency (RF) pulsing impedance tuning with multiplier mode | Justin Phi, Kartik Ramaswamy, Sergio Fukuda Shoji, Daisuke Shimizu | 2020-12-01 |
| 10790126 | Smart RF pulsing tuning using variable frequency generators | — | 2020-09-29 |
| 10593518 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Chunlei Zhang | 2020-03-17 |