Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811296 | Substrate support with dual embedded electrodes | Philip Allan Kraus | 2020-10-20 |
| 10770270 | High power electrostatic chuck with aperture-reducing plug in a gas hole | Haitao Wang, Vijay D. Parkhe, Kartik Ramaswamy, Chunlei Zhang | 2020-09-08 |
| 10714372 | System for coupling a voltage to portions of a substrate | Thai Cheng Chua, Philip Allan Kraus, Travis Koh, Christian Amormino | 2020-07-14 |