Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763150 | System for coupling a voltage to spatially segmented portions of the wafer with variable voltage | Roger Alan Lindley, Philip Allan Kraus | 2020-09-01 |
| 10748745 | Modular microwave plasma source | Philip Allan Kraus | 2020-08-18 |
| 10720311 | Phased array modular high-frequency source | Philip Allan Kraus, Christian Amormino, Dmitry A. Dzilno | 2020-07-21 |
| 10714372 | System for coupling a voltage to portions of a substrate | Philip Allan Kraus, Travis Koh, Christian Amormino, Jaeyong Cho | 2020-07-14 |
| 10707058 | Symmetric and irregular shaped plasmas using modular microwave sources | Farzad Houshmand, Christian Amormino, Philip Allan Kraus | 2020-07-07 |