Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854428 | Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage | Tsutomu Tanaka, Alexander V. Garachtchenko, Keiichi Tanaka | 2020-12-01 |
| 10763085 | Shaped electrodes for improved plasma exposure from vertical plasma source | Kallol Bera, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka | 2020-09-01 |
| 10720311 | Phased array modular high-frequency source | Philip Allan Kraus, Thai Cheng Chua, Christian Amormino | 2020-07-21 |