Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854428 | Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage | Tsutomu Tanaka, Dmitry A. Dzilno, Keiichi Tanaka | 2020-12-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854428 | Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage | Tsutomu Tanaka, Dmitry A. Dzilno, Keiichi Tanaka | 2020-12-01 |