Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854428 | Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage | Tsutomu Tanaka, Dmitry A. Dzilno, Alexander V. Garachtchenko | 2020-12-01 |
| 10801977 | Radiation analyzing apparatus and radiation analyzing method | Atsushi Nagata, Satoshi Nakayama, Kazuo Chinone | 2020-10-13 |
| 10606177 | Substrate processing apparatus, substrate processing method, and storage medium | Tomohiro Iseki | 2020-03-31 |