Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879042 | Symmetric plasma source to generate pie shaped treatment | Anantha K. Subramani, Farzad Houshmand, Philip Allan Kraus, Abhishek Chowdhury, John C. Forster | 2020-12-29 |
| 10763085 | Shaped electrodes for improved plasma exposure from vertical plasma source | Dmitry A. Dzilno, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka | 2020-09-01 |
| 10685864 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Joseph Yudovsky | 2020-06-16 |
| 10633741 | Recursive inject apparatus for improved distribution of gas | Aaron Miller | 2020-04-28 |