Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861736 | Apparatus and methods for wafer rotation in carousel susceptor | Kaushal Gangakhedkar | 2020-12-08 |
| 10685864 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Kallol Bera | 2020-06-16 |
| 10658223 | Apparatus for prevention of backside deposition in a spatial ALD process chamber | Alexander S. Polyak | 2020-05-19 |
| 10597779 | Susceptor position and rational apparatus and methods of use | William T. Weaver, Robert Brent Vopat, Jason M. Schaller | 2020-03-24 |
| 10586720 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2020-03-10 |