Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854491 | Dynamic leveling process heater lift | Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, Gregory John Freeman, Robert Brent Vopat | 2020-12-01 |
| 10818525 | Ambient controlled transfer module and process system | Shay Assaf, Andrew J. Constant, Jacob Newman, Charles T. Carlson, Stephen C. Hickerson | 2020-10-27 |
| 10699930 | Buffer chamber wafer heating mechanism and supporting robots | Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2020-06-30 |
| 10597779 | Susceptor position and rational apparatus and methods of use | Robert Brent Vopat, Joseph Yudovsky, Jason M. Schaller | 2020-03-24 |
| 10586720 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2020-03-10 |