Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699930 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon | 2020-06-30 |
| 10669430 | Anti-reflective coating for transparent end effectors | — | 2020-06-02 |
| 10600662 | Silicon carbide substrate heating | — | 2020-03-24 |