Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Jeffrey Blahnik, Timothy Joseph Franklin +1 more | 2020-12-01 |
| 10832928 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, Paul B. Reuter | 2020-11-10 |
| 10741432 | Systems, apparatus, and methods for a load port door opener | — | 2020-08-11 |
| 10699930 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, Paul E. Pergande | 2020-06-30 |