Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Timothy Joseph Franklin, David Blahnik +1 more | 2020-12-01 |
| 10831112 | Reticle processing system | James D. Strassner, Charles T. Carlson, Robert Brent Vopat | 2020-11-10 |
| 10586720 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2020-03-10 |