Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Jeffrey Blahnik, David Blahnik +1 more | 2020-12-01 |
| 10790175 | Selective etch rate monitor | Philip Allan Kraus | 2020-09-29 |
| 10607817 | Thermal repeatability and in-situ showerhead temperature monitoring | Steven E. Babayan, Philip Allan Kraus | 2020-03-31 |